Field Emission Scanning Electron Microscopy： New Perspectives for Materials Characterization

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Since a few years, recent developments in the field of scanning electron microscopy have led to extending the range of application of SEM, especially in the characterization of thin specimens with low voltage scanning transmission electron microscopy (STEM). More specifically, Kikuchi diffraction techniques by transmission emerged with the parallel work of Keller (Keller and Geiss 2012), Trimby (2012) and Brodusch (Brodusch et al. 2013a, b) which now allows orientation mapping and phase identification of nanomaterials with a spatial resolution close to that obtained with a transmission electron microscope (TEM). Recently, a new type of electron backscatter diffraction (EBSD) camera with the screen normal to the electron beam direction was introduced on the market.